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Lithography
Lithography news and technical articles from Laser Focus World. Search Lithography latest and archived news and articles
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Vistec provides ITME in Warsaw with a high-performance electron-beam lithography system
… leading supplier of electron-beam lithography systems, announced that the noted Institute ..... system SB251 from Vistec. The advanced lithography tool will be used for research and manufacturing ..... materials as well as masks for optical lithography . As a leading research institute in …
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Lithography mask-aligner tools now paired with simulation software
… agreement to combine the SUSS MicroTec lithography mask-aligner exposure-optics tools ..... companies say that a combination of lithography equipment and matching simulation software ..... simulation platform for optical proximity lithography , which enables to optimize mask layout …
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NIST measures contamination of EUV lithography optics due to outgassing
… contamination of extreme-UV ( EUV ) lithography optics, researchers at the National ..... possible for conventional deep-UV lithography -- but the EUV regime raises new questions ..... photoresists that may be used in EUV lithography . The outgassing characteristics have …
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OPTOELECTRONIC APPLICATIONS: MICROPROCESSING: Imprint lithography challenges EUV for next-generation chip manufacturing
… committed to 193 nm photolithography and immersion lithography for chip manufacturing down to the sub-32 ..... techniques have been investigated, including soft lithography , AFM/dip-pen lithography , interference lithography , and nanoimprint …
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LITHOGRAPHY : Interference lithography creates 50-nm-period gratings
… integrated-circuit (IC) designs, interference lithography has been used to successfully fabricate grating ..... ICs are currently fabricated using immersion lithography and/or nanoimprint lithography (NIL) and other techniques to achieve fine …
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IBM researchers push DUV lithography envelope
… produced by deep-ultraviolet (DUV) lithography down to just under 30 nm. They have ..... of the fluid used in the immersion- lithography process; this change will allow the ..... decades-long reign of refractive optical lithography , postponing the need to switch to the …
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NANOLITHOGRAPHY: RAPID lithography achieves /20 resolution
… used, alternate techniques such as nanoimprint lithography and dip-pen lithography are being explored. Besides the need for smaller integrated-circuit features, lithography also plays a role in the fabrication of two …
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PHOTOLITHOGRAPHY: Holography makes a bid in the search for maskless lithography
… thing–or small thing–in lithography could do away with photomasks ..... contributors to capital costs in lithography is the photomask. Approaches ..... to allow so-called maskless lithography stand to save manufacturers …
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PHOTOLITHOGRAPHY: Holography makes a bid in the search for maskless lithography
… thing–or small thing–in lithography could do away with photomasks ..... contributors to capital costs in lithography is the photomask. Approaches ..... to allow so-called maskless lithography stand to save manufacturers …
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EUV LITHOGRAPHY : Cymer’s EUV source moves closer to production
As it did in the 1980s when it developed an excimer laser designed from the ground up for optical lithography , Cymer (San Diego, CA) is aiming to capture virtually the entire market for next-generation lithographic light sources …
